A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator
نویسندگان
چکیده
منابع مشابه
A Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator
Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplifie...
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ژورنال
عنوان ژورنال: International Journal of Computer Applications
سال: 2017
ISSN: 0975-8887
DOI: 10.5120/ijca2017913097